Integrated Circuits Interconnect Metallization for the Submicron Age

The interconnect metallization being used by the semiconductor industry has been aluminum or aluminum silicon. Aluminum silicon is being replaced by aluminum copper and aluminum copper silicon, due to its superior resistance to electromigration and hillock growth. This paper discusses the implementation of aluminum copper/silicon alloys in semiconductor processing, along with a review of the problems and advantages of the same

Properties of Ruthenium Oxide Coatings

Ruthenium oxide coatings have been deposited on titanium substrates using a flood coating process. These films were heat treated for varying times and temperatures. The resulting films subsequently were characterized by performing resistivity and SEM analyses. Resistivity of the ruthenium oxide coating was found to be extremely dependent upon the firing temperature. Effect of the process conditions and formulations of the coatings on the morphology with respect to their electrical characteristics is presented. Capacitors were fabricated using plates coated with ruthenium oxide coatings. Capacitance versus heat treatment temperatures are discussed and at one firing temperature (480\u27C), the capacitance was 50 times the control capacitor value

Study of Deposition Methods for Silicon Powder

Silicon powder tends to agglomerate at normal atmospheric conditions and is, hence, difficult to aerosolize. Several methods of aerosolizing silicon powder and finally depositing it on various substrates were investigated. This paper presents the investigated methods of aerosolization. The electrostatic spray coating used in dry paint application was found to be the most suitable. The general merits of this method and its use for silicon powder deposition to form films are discussed

A Demonstration of the BigDAWG Polystore System

ABSTRACT This paper presents BigDAWG, a reference implementation of a new architecture for "Big Data" applications. Such applications not only call for large-scale analytics, but also for real-time streaming support, smaller analytics at interactive speeds, data visualization, and cross-storage-system queries. Guided by the principle that "one size does not fit all", we build on top of a variety of storage engines, each designed for a specialized use case. To illustrate the promise of this approach, we demonstrate its effectiveness on a hospital application using data from an intensive care unit (ICU). This complex application serves the needs of doctors and researchers and provides real-time support for streams of patient data. It showcases novel approaches for querying across multiple storage engines, data visualization, and scalable real-time analytics